JPH055632B2 - - Google Patents

Info

Publication number
JPH055632B2
JPH055632B2 JP61288023A JP28802386A JPH055632B2 JP H055632 B2 JPH055632 B2 JP H055632B2 JP 61288023 A JP61288023 A JP 61288023A JP 28802386 A JP28802386 A JP 28802386A JP H055632 B2 JPH055632 B2 JP H055632B2
Authority
JP
Japan
Prior art keywords
surface plate
workpiece
wrapping
support
support arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61288023A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63144956A (ja
Inventor
Isao Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP61288023A priority Critical patent/JPS63144956A/ja
Publication of JPS63144956A publication Critical patent/JPS63144956A/ja
Publication of JPH055632B2 publication Critical patent/JPH055632B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP61288023A 1986-12-03 1986-12-03 平面ラツピング装置 Granted JPS63144956A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61288023A JPS63144956A (ja) 1986-12-03 1986-12-03 平面ラツピング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61288023A JPS63144956A (ja) 1986-12-03 1986-12-03 平面ラツピング装置

Publications (2)

Publication Number Publication Date
JPS63144956A JPS63144956A (ja) 1988-06-17
JPH055632B2 true JPH055632B2 (en]) 1993-01-22

Family

ID=17724811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61288023A Granted JPS63144956A (ja) 1986-12-03 1986-12-03 平面ラツピング装置

Country Status (1)

Country Link
JP (1) JPS63144956A (en])

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5525792B2 (ja) * 2009-10-15 2014-06-18 株式会社 ハリーズ 研削装置
TWI476854B (zh) * 2012-03-08 2015-03-11 Lg Cns Co Ltd Led晶圓的提供裝置及方法
US9045827B2 (en) 2012-03-09 2015-06-02 Lg Cns Co., Ltd. Apparatus and method for supplying light-emitting diode (LED) wafer
JP6150283B2 (ja) * 2013-07-03 2017-06-21 浜井産業株式会社 ワーク嵌合装置および嵌合方法
CN104924197A (zh) * 2015-05-28 2015-09-23 海宁奇晟轴承有限公司 一种自动双盘研磨机
CN115870868A (zh) * 2022-12-27 2023-03-31 西安奕斯伟材料科技有限公司 装卸装置、方法及硅片双面抛光设备

Also Published As

Publication number Publication date
JPS63144956A (ja) 1988-06-17

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